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Product Information ?  WEB Catalog  ? Clean Series/Low-Particle Generation  ? Directional Control Valves

Directional Control Valves

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5 Port Solenoid Valve 10-SY

    Clean Series



    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
SeriesSonic conductance: CCylinder sizePower consumptio (W)
10-SY30001.1dm3(s?bar)φ400.35
10-SY50002.8dm3(s?bar)φ630.35
10-SY70004.5dm3(s?bar)φ800.35
10-SY900010dm3(s?bar)φ1000.35

5 Port Solenoid Valve 10-SV

    Clean Series



    ＊The EX500 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
SeriesSonic conductance: CCylinder sizePower consumption (W)
10-SV10001.1dm3(s?bar)φ400.6
10-SV20002.8dm3(s?bar)φ630.6
10-SV30004.5dm3(s?bar)φ800.6
10-SV400010dm3(s?bar)φ1000.6

4/5 Port Solenoid Valve 10-SYJ

    Clean Series



    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
SeriesSonic conductance: CCylinder sizePower consumption (W)
10-SYJ30000.46dm3(s?bar)φ250.35
10-SYJ50000.83dm3(s?bar)φ400.35
10-SYJ70002.9dm3(s?bar)φ500.35

5 Port Solenoid Valve 10-SZ

    Clean Series



    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
SeriesSonic conductance: CCylinder sizePower consumption (W)
10-SZ30000.77dm3(s?bar)φ320.6

5 Port Solenoid Valve 10-S0700

    Clean Series



    ＊The EX250/500 series is to be discontinued. When designing new
    　equipment and facilities, consider using another series (EX260/EX600)
    　instead.
SeriesFlow rate characteristics
1→4/2（P→A/B）
C［dm3/（s?bar）］		Flow rate characteristics
1→4/2（P→A/B）
b		Flow rate characteristics
1→4/2（P→A/B）
Cv		Cylinder sizePower consumption
(W)
10-S07000.390.390.11φ250.35

5 Port Solenoid Valve 10-VQ

    Clean Series



    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
SeriesFlow rate characteristics
2/4→3/5 (A/B→R1/R2)
C [dm3/(s?bar)]		Flow rate characteristics
2/4→3/5 (A/B→R1/R2)
b		Flow rate characteristics
2/4→3/5 (A/B→R1/R2)
Cv		Cylinder sizePower consumption (W)
10-VQ10001.00.300.25φ400.4 (Basic)
10-VQ20003.20.300.80φ630.4 (Basic)

5 Port Solenoid Valve 10-SQ

SeriesSonic conductance: CCylinder sizePower consumption (W)
10-SQ10000.83dm3(s?bar)φ321.0
10-SQ20002.9dm3(s?bar)φ631.0

4 Port Solenoid Valve / Direct Operated Poppet Type 10-VQD

SeriesSonic conductance: CCylinder sizePower consumption (W)
10-VQD10000.19dm3(s?bar)φ252.0

3 Port Solenoid Valve 10-V100

ModelTypeSonic conductance: CPower consumption (W)
10-V100Standard type0.037dm3(s?bar)0.35＊(0.1)
10-V100Large flow type0.076dm3(s?bar)1.0

3 Port Solenoid Valve 10-SYJ

SeriesSonic conductance: CPower consumption (W)
10-SYJ3000.36dm3(s?bar)0.35
10-SYJ5001.2dm3(s?bar)0.35
10-SYJ7003.0dm3(s?bar)0.35

3 Port Solenoid Valve 10-SY

SeriesTypeSonic conductance: CPower consumption (W)
10-SY100Standard type＊0.14mm20.5
10-SY100Large flow type＊0.22mm20.5

3 Port Solenoid Valve 10-S070

SeriesFlow rate characteristics
C[dm3/(s·bar)]		Flow rate characteristics
b		Flow rate characteristics
Cv		Power consumption
(W)		Max. operating pressure:
MPa
10-S0700.0420.270.0110.50.5
10-S0700.0600.280.0160.50.3
10-S0700.0420.270.0110.350.3
10-S0700.0600.280.0160.350.1
10-S0700.0210.270.0060.1
(With power saving circuit)		0.3
10-S0700.0420.280.0110.1
(With power saving circuit)		0.1

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