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Product Information ?  WEB Catalog  ? Process Gas Equipment　AP Tech  ? Process Gas Equipment

Process Gas Equipment

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Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

    ?For UHP gas delivery in semiconductor and other clean industries
    ?Body material: 316L SS secondary remelt or 316L SS
    ?Electropolished wetted parts
    ?External metal seal construction
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SeriesTypeApplicationBody materialConnection typeConnection size
AP/SLSingle stageDistribution (Compact)316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
AP/SLSingle stageDistribution316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageBulk gas316L SSFace seal
Tube weld		1/2'', 3/4'', 1''
AP/SLSingle stageSource316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
1/2'', 3/4''
AP/SLSingle stageSub-atmospheric pressure316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
1/2'', 3/4''
APTwo stageSource316L SS
secondary remelt		Face seal
Tube weld		1/4''，3/8''
AZSingle stageDistribution316L SSFace seal
Tube weld		1/4'', 3/8''
1/2''
AZSingle stageSource316L SSFace seal
Tube weld		1/4'', 3/8''
1/2''
AZSingle stageSub-atmospheric pressure316L SSFace seal
Tube weld		1/4'', 3/8''
1/2''

Diaphragm Valve for Ultra High Purity AP

    ?For UHP gas delivery in semiconductor and other clean industries
    ?Used as a gas shutoff valve
    ?No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
SeriesTypeBody materialConnection typeConnection size
APAir operated type316L SS
secondary remelt		Face seal
Tube weld		1/4''，3/8''
1/2''，3/4''
APManually operated316L SS
secondary remelt		Face seal
Tube weld		1/4'', 3/8''
1/2'', 3/4''

Check Valve/Vacuum Generator/Flow Switch AP

    [Check valve]
    ?Fluid backflow is prevented by back pressure.
    ?Unique design with only one moving part in the gas stream, an O-ring
    ?Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side

    [Vacuum generator]
    ?Vacuum generation equipment
    ?Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement

    [Flow switch]
    ?Detects excess flow above a given flow rate caused by pipe breakage, etc.
SeriesTypeBody materialConnection typeConnection size
APCheck valve316L SS secondary remeltFace seal
Tube weld		1/4'', 3/8''
APVacuum generator316L SSFace seal
Tube weld		1/4'', 3/8''
APFlow switch316L SS secondary remelt
316L SS		Face seal
Tube weld		1/2'', 3/4''

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